X-ray patterning of sub-100 nm spatial features
WHO: Adam Leontowich, Adam Hitchcock, Harald Stover
WHERE: Advanced & Canadian Light Source Scanning
Transmission X-ray Microscope (STXM)
WHAT: Use of chemical development pushes STXM-based patterning to better spatial resolution
While the PhD thesis research of Jian Wang [1,2] showed that tunable
synchrotron light in a STXM can generate chemically selective patterns
inmulti-layer polymer structures, the spatial resolution achieved
was 150 nm or worse, due to radiation damage spreading mechanism.
Since then a further signifcant improvement in spatial resolution has been achieved.
OTHER INFORMATION: Chemically selective patterning has been
© 2009 A.P. Hitchcock / McMaster University
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